☆型号:5517D-C19 激光头 半导体光刻和平板应用
【产品详情】
Keysight 5517D 的主要用途包括基于 VME 和 PC 的系统,以及运动速度更快的 Keysight 5501A 和 5527A 系统,例如半导体光刻和平板应用。
Keysight 5517C 主要用于基于 VME 和基于个人电脑的系统以及 Keysight 5501A 和 5527A 系统等运动速度更快的应用,例如半导体光刻和平板应用。
一般特性
线性光学的最大速度:711 mm/s
参考频率:2.4 至 3.0 MHz
重量:3.4 kg(7.5 磅)
预热时间:90 分钟
激光束
直径:6 mm;选件 003:3 mm;选件 009:9 mm
最小输出功率:180 µW;选件 H03:300 µW;选件 H05:240 µW;选件 H07:400 µW
最大输出功率:1 mW
光束高度:79.5 ± 1.0 mm
输入功率要求
+15 V ± 0.3 V(3.0 A 最大值)
-15 V ± 0.3 V(0.3 A 最大值)
Keysight 5517C 主要用于基于 VME 和基于个人电脑的激光干涉仪系统等运动速度更快的应用,例如半导体光刻和平板应用。 选件 009 提供了 9 mm 直径的光束,可以与三轴干涉仪配合使用,进行更大角度范围的测量。 请联系是德科技了解定制要求。
☆型号:5517D-C19 激光头 半导体光刻和平板应用
【英文介绍】
Key uses for the Keysight 5517D include VME - and PC-based systems, as well as the Keysight 5501A and 5527A systems that move faster, such as semiconductor lithography and flat panel applications.
The Keysight 5517C is primarily used in VME - and PC-based systems and in faster-moving applications such as the Keysight 5501A and 5527A systems, such as semiconductor lithography and flat panel applications.
General characteristic
Maximum speed of linear optics: 711 mm/s
Reference frequency: 2.4 to 3.0 MHz
Weight: 3.4kg (7.5lb)
Preheating time: 90 minutes
Laser beam
Diameter: 6 mm; Option 003:3 mm; Option 009:9 mm
Minimum output power: 180 µW; Option H03:300µW; Option H05:240µW; Option H07:400 µW
Maximum output power: 1 mW
Beam height: 79.5 ± 1.0mm
Input power requirement
+15 V ± 0.3V (3.0A Max)
-15 V ± 0.3V (0.3A Max)
The Keysight 5517C is primarily used in applications with higher moving speeds such as VME and PC-based laser interferometer systems, such as semiconductor lithography and flat panel applications. Option 009 offers a 9 mm diameter beam that can be used in conjunction with a three-axis interferometer for a wider range of angular measurements. Please contact Keysight Technology for customization requirements.
☆型号:5517D-C19 激光头 半导体光刻和平板应用
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